The reoxidation of oxynitride films on silicon at 1050°C

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  1. National Research Council of Canada. NRC Plant Biotechnology Institute
  2. National Research Council of Canada. NRC Institute for Microstructural Sciences
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NPARC number12327245
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Record identifier39d1bc09-24cd-47de-982a-4f421de8c3aa
Record created2009-09-10
Record modified2020-03-20
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