| Download | - View final version: An interferometer for thin film measurement (PDF, 1.4 MiB)
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| DOI | Resolve DOI: https://doi.org/10.4224/21274737 |
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| Author | Search for: Wilkinson, R.L.1 |
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| Affiliation | - National Research Council of Canada
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| Format | Text, Technical Report |
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| Physical description | 17 p. |
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| Subject | film; interferometer |
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| Abstract | The multiple-beam interferometer described here is intended to measure the thickness of evaporated films whose thickness is in the order of 1000 A. The accuracy of these measurements is ± 2%. The multiple-beam principle is outlined followed by a consideration of the design steps including choice of air wedge angle and thickness, microscope objective, degree of collimation. The completed interferometer is described with proposed improvements. |
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| Publication date | 1968-01 |
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| Publisher | National Research Council of Canada. Radio and Electrical Engineering Division |
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| Series | |
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| Language | English |
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| NPARC number | 21274737 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 36b98901-05f8-4f3c-9527-fa8dca25270e |
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| Record created | 2015-03-31 |
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| Record modified | 2023-01-25 |
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