| Download | - View accepted manuscript: Chemical force microscopy for hot-embossing lithography release layer characterization (PDF, 663 KiB)
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| DOI | Resolve DOI: https://doi.org/10.1039/b600936k |
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| Author | Search for: Cameron, Neil S.1; Search for: Ott, Arnaud1; Search for: Roberge, Hélène1; Search for: Veres, Teodor1 |
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| Affiliation | - National Research Council of Canada. NRC Industrial Materials Institute
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| Format | Text, Article |
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| Abstract | We employed variable temperature chemical force microscopy (VT-CFM) using tips silanized with four different hydro- and hydrofluoroalkyl self-assembling monolayers (SAMs) interacting with a thin-film of poly(cyclic olefin), (PCO) to model the hot-embossing stamp-polymer interaction over a temperature range spanning the glass transition of the PCO. |
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| Publication date | 2006-05-17 |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| NRC number | NRCC 48855 |
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| NPARC number | 15878012 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 311c6fc2-9859-4cab-b0ba-e6368e69a27a |
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| Record created | 2010-07-30 |
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| Record modified | 2020-04-22 |
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