Physics and Technology of High-k Gate Dielectrics III

From National Research Council Canada

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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Book Chapter
PublisherThe Electrochemical Society
PlacePennington, NJ
In
NPARC number12346255
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Record identifier309a00d1-265f-4fbd-906a-39a7a819a22d
Record created2009-09-17
Record modified2020-03-03
Date modified: