Post-processing of commercial CMOS chips for the fabrication of DNA Bio-FET sensor arrays

From National Research Council Canada

Alternative titleMater Res Soc Sym
DOIResolve DOI: https://doi.org/10.1557/PROC-0951-E05-09
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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
  2. National Research Council of Canada. NRC Steacie Institute for Molecular Sciences
FormatText, Article
Abstract
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PublisherMaterials Research Society
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Peer reviewedYes
NPARC number12346216
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Record identifier2aec63f5-0091-4809-9a48-1c7289dc64b1
Record created2009-09-17
Record modified2020-04-22
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