Absorbance measurement of polymers at EUV wavelength: Correlation between experimental and theoretical calculations
Absorbance measurement of polymers at EUV wavelength: Correlation between experimental and theoretical calculations
| Format | Text, Article |
|---|---|
| Publication date | 2006 |
| In | |
| Peer reviewed | Yes |
| NRC number | 82 |
| NPARC number | 8926228 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | 1693b44e-3aca-47d5-86c6-922fa7af0874 |
| Record created | 2009-04-23 |
| Record modified | 2020-04-22 |
- Date modified: