| DOI | Resolve DOI: https://doi.org/10.1109/NUSOD.2013.6633101 |
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| Author | Search for: Hryciw, Aaron1; Search for: Wu, Marcelo1; Search for: Khanaliloo, Behzad1; Search for: Healey, Christopher1; Search for: Barclay, Paul E.1 |
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| Affiliation | - National Research Council of Canada. Security and Disruptive Technologies
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| Format | Text, Article |
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| Conference | 13th International Conference on Numerical Simulation of Optoelectronic Devices, NUSOD 2013, August 19-22, 2013, Vancouver, BC, Canada |
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| Subject | Mechanical displacements; Nanomechanical resonances; Nanoscale cantilevers; Opto-mechanical sensors; Photonic crystal nanocavities; Photonic crystal nanocavity; Resonance frequencies; Silicon cantilever; Computer simulation; Nanocantilevers; Nanotechnology; Numerical models; Optimization; Photonic crystals; Sensors; Optoelectronic devices |
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| Abstract | Optomechanical nanocavities allow nanomechanical resonances to be measured optically with high sensitivity. We have created a new type of photonic crystal nanocavity optomechanical sensor optimized for detecting sources of torque and other forces which can deflect nanoscale cantilevers. This nanocavity consists of two precisely engineered photonic Bragg mirrors patterned in silicon cantilevers and separated by a 50-100 nm wide gap. Simulations of the optical and mechanical modes predict that mechanical displacements of the sub-picogram cantilevers will shift the optical nanocavity resonance frequency at a rate exceeding 20 GHz / nm, and that the nanocavity optical mode may have a quality factor Qo > 10⁶in optimized devices. |
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| Publication date | 2013 |
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| Series | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 21270972 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 145c9d76-9c9e-4a53-a6b3-d14251fd539a |
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| Record created | 2014-02-18 |
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| Record modified | 2020-04-22 |
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