Fabrication of nanoelectromechanical resonators using a cryogenic etching technique

From National Research Council Canada

Alternative titleJournal of Vacuum Science & Technology B
FormatText, Other
Publication date
NRC number477
NPARC number8926540
Export citationExport as RIS
Report a correctionReport a correction (opens in a new tab)
Record identifier11fc1ca8-5e03-4e96-8445-c620110ec81b
Record created2009-04-23
Record modified2020-03-03
Date modified: