Fabrication of nanoelectromechanical resonators using a cryogenic etching technique
Fabrication of nanoelectromechanical resonators using a cryogenic etching technique
Alternative title | Journal of Vacuum Science & Technology B |
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Format | Text, Other |
Publication date | 2006 |
NRC number | 477 |
NPARC number | 8926540 |
Export citation | Export as RIS |
Report a correction | Report a correction (opens in a new tab) |
Record identifier | 11fc1ca8-5e03-4e96-8445-c620110ec81b |
Record created | 2009-04-23 |
Record modified | 2020-03-03 |
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