Large-area pulsed laser deposition of silicon carbide films

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DOIResolve DOI: https://doi.org/10.1557/PROC-715-A24.3
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Affiliation
  1. National Research Council of Canada. NRC Industrial Materials Institute
FormatText, Article
Conference2002 Materials Research Society Spring Meeting, April 1-5 2002, San Francisco California
Abstract
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PublisherSpringer
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LanguageEnglish
Peer reviewedYes
IdentifierS1946427400123784
NPARC number21272974
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Record identifier11e487f6-58c6-449f-bb06-6cee63fd8981
Record created2014-12-03
Record modified2024-03-01
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