DOI | Resolve DOI: https://doi.org/10.1002/jemt.22044 |
---|
Author | Search for: Wang, Xiongyao1; Search for: Lockwood, Ross1; Search for: Vick, Doug1; Search for: Li, Peng1; Search for: Meldrum, Al1; Search for: Malac, Marek1 |
---|
Affiliation | - National Research Council of Canada. Security and Disruptive Technologies
|
---|
Format | Text, Article |
---|
Subject | electron tomography; sample preparation; FIB; high tilt range; thin film deposition |
---|
Abstract | Here we report a new sample preparation method for three-dimensional electron tomography. The method uses the standard film deposition and focused ion beam (FIB) methods to significantly reduce the problems arising from the projected sample thickness at high tilt angles. The method can be used to prepare tomography samples that can be imaged up to a ±75° tilt range which is sufficient for many practical applications. The method can minimize the problem of Ga+ contamination, as compared to the case of FIB preparation of rod-shaped samples, and provides extended thin regions for standard 2D projection analyses. |
---|
Publication date | 2012-03-27 |
---|
In | |
---|
Language | English |
---|
Peer reviewed | Yes |
---|
NPARC number | 21268162 |
---|
Export citation | Export as RIS |
---|
Report a correction | Report a correction (opens in a new tab) |
---|
Record identifier | 0a699e58-b9b8-4753-9912-793888be0425 |
---|
Record created | 2013-05-14 |
---|
Record modified | 2020-04-21 |
---|