A convenient method for electron tomography sample preparation using a focused ion beam

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1002/jemt.22044
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Affiliation
  1. National Research Council of Canada. Security and Disruptive Technologies
FormatText, Article
Subjectelectron tomography; sample preparation; FIB; high tilt range; thin film deposition
Abstract
Publication date
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LanguageEnglish
Peer reviewedYes
NPARC number21268162
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Record identifier0a699e58-b9b8-4753-9912-793888be0425
Record created2013-05-14
Record modified2020-04-21
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