Improving geometric quality of laser machined parts using high-precision motion system dynamic performance analysis

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Proceedings titleProceedings WMC'2001
ConferenceThird International ICSC-NAISO World Manufacturing Congress(WMC'2001) September 24 - 27 2001, Rochester New York
AbstractDynamic performance of the motion system is a key element for achieving the highest accuracy and precision from a particular laser micromachining system. This paper describes an analysis of the dynamic performance of a high-precision motion system and its relevance to the improvement in geometric quality of the machined parts. The dynamic and statistical parameters of motion are utilized to evaluate the dynamic performance of the entire motion system. Also, experimental results applied to high-laser micromachining allow significant improvements in the precision and quality of the machined parts. An example of a micromachined line pattern on a flexible circuit board is presented. Better geometric quality in machined parts with increased precision in the track width, from +/-2.20 µm up to +/- 0.75 µm was obtained. The results highlight sources of improvement in the part geometric quality and the laser micromachining process.
Publication date
AffiliationNRC Industrial Materials Institute; National Research Council Canada
Peer reviewedYes
NPARC number21272560
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Record identifier093343ba-98dd-49e8-b915-cc6739fd4553
Record created2014-12-02
Record modified2016-05-09
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