| DOI | Resolve DOI: https://doi.org/10.1117/12.875488 |
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| Author | Search for: Janz, S.1; Search for: Cheben, P.1ORCID identifier: https://orcid.org/0000-0003-4232-9130; Search for: Schmid, J.H.1; Search for: Bock, P.1; Search for: Halir, R.; Search for: Xu, D.-X.1; Search for: Densmore, A.1; Search for: Ma, R.1; Search for: Molina-Fernandez, I.; Search for: Delâge, A.1; Search for: Vachon, M.1; Search for: Lapointe, J.1; Search for: Sinclair, W.1; Search for: Post, E.1; Search for: Lamontagne, B.1 |
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| Affiliation | - National Research Council of Canada. NRC Institute for Microstructural Sciences
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| Format | Text, Article |
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| Conference | Silicon Photonics VI, January 23-26, 2011, San Francisco, CA, USA |
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| Subject | cladding layer; electric field profiles; etch depth; grating couplers; high-index contrast waveguides; length scale; lithographic patterning; molecular monolayer; optical bio-sensors; optical structures; segmented waveguides; semi-conductor fabrication; silicon photonics; sub-wavelength; waveguide core; biosensors; electric fields; integrated optics; light; metamaterials; monolayers; nanophotonics; optical instruments; optical materials; optical properties; photonic devices; semiconductor devices; waveguides; photonics |
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| Abstract | As a result of the evolution semiconductor fabrication tools and methods over several decades, it now possible to routinely design and make optical devices with features comparable to or smaller than the wavelength of the light that propagates through these structures. This paper will review some silicon optical structures with critical features at these extremely short length scales. For example it becomes possible to create segmented waveguide structures with optical properties that can be tuned continuously between those of the cladding and waveguide core, using lithographic patterning rather than varying etch depth. Using thin high index contrast waveguides and the correct polarization, the optical electric field profiles can be shaped to maximize the coupling to molecular monolayers or cladding layers with specific functionality. Examples are given from our recent work on optical biosensors chips which employ grating couplers made by sub-wavelength digital patterning, and use waveguides optimized for coupling to molecular monolayers. |
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| Publication date | 2011 |
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| Publisher | SPIE |
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| Series | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 21271367 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 083e6d73-5579-4ac0-b38e-33f725c5f071 |
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| Record created | 2014-03-24 |
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| Record modified | 2020-04-21 |
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