High fidelity, high yield production of microfluidic devices by hot embossing lithography : Rheology and stiction

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DOIResolve DOI: https://doi.org/10.1039/b600584e
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  1. National Research Council of Canada. NRC Industrial Materials Institute
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LanguageEnglish
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NRC numberNRCC 48856
NPARC number15878011
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Record identifier00b6b34d-77c7-4908-9e3c-d6462590050e
Record created2010-07-30
Record modified2020-04-22
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